Proses 7 nm
| Pembuatan perangkat semikonduktor |
|---|
|
MOSFET scaling (node proses) |
|
Future
|
Pada bidang manufaktur semikonduktor, dalam Peta Jalan Perangkat dan Sistem Internasional mendefinisikan proses 7 nm adalah generasi lanjutan dari teknologi MOSFET proses 10 nm. Proses ini didasarkan pada teknologi FinFET (fin field-effect transistor), sejenis teknologi MOSFET multi-gerbang.
Taiwan Semiconductor Manufacturing Company (TSMC) memulai produksi chip memori SRAM 256 Mbit menggunakan proses 7 nm yang disebut N7 pada Juni 2016,[1] kemudian Samsung memulai produksi massal proses 7 nm mereka yang disebut perangkat 7LPP pada tahun 2018.[2] Produk awal untuk teknologi prosesor 7 nm adalah Apple A12 Bionic, dirilis pada acara Apple September 2018.[3] Meskipun Huawei mengumumkan prosesor 7 nm (Kirin 980) miliknya sendiri sebelum Apple A12 Bionic, pada 31 Agustus 2018, tetapi Apple A12 Bionic dirilis di pasarkan massal lebih awal. Kedua chip tersebut diproduksi oleh TSMC.[4]
Pada tahun 2017 AMD merilis prosesor "Roma" (EPYC 2) untuk aplikasi server dan pusat data, yang didasarkan pada proses N7 TSMC [5] dengan fitur 64 inti dan 128 utas. Mereka juga merilis prosesor desktop konsumen "Matisse" dengan fitur 16 inti dan 32 utas. Namun, cetakan I/O pada modul multi-chip Roma (MCM) dibuat dengan proses 14 nm (14HP) oleh GlobalFoundries, sementara cetakan I/O Matisse menggunakan proses 12 nm (12LP+) GlobalFoundries. Seri Radeon RX 5000 juga didasarkan pada proses N7 TSMC.[6]
| Samsung | TSMC | Intel | SMIC | |||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Process name | 7LPP[7][8] | 6LPP[9] | N7[10] | N7P[11] | N7+[12] | N6 | Intel 7[13][diperdebatkan ] (10 nm)[14] | N+1 (>7 nm) | N+2 (7 nm) | 7 nm EUV |
| Transistor density (MTr/mm2) | 95.08–100.59[15][16] | Tidak diketahui | 91.2–96.5[17][18] | 113.9[17] | 114.2[19] | 100.76–106.1[20][21] 60.41[22] | 89[23] | Tidak diketahui[24][butuh rujukan] | Tidak diketahui | |
| SRAM bit-cell size | 0.0262 μm2[25] | Tidak diketahui | 0.027 μm2[25] | Tidak diketahui | Tidak diketahui | 0.0312 μm2 | Tidak diketahui | Tidak diketahui | Tidak diketahui | |
| Transistor gate pitch | 54 nm | Tidak diketahui | 57 nm | 54 nm | Tidak diketahui | 63 nm | Tidak diketahui | |||
| Transistor fin pitch | 27 nm | Tidak diketahui | N/A | Tidak diketahui | Tidak diketahui | 34 nm | Tidak diketahui | Tidak diketahui | Tidak diketahui | |
| Transistor fin height | Tidak diketahui | Tidak diketahui | N/A | Tidak diketahui | Tidak diketahui | 53 nm | Tidak diketahui | Tidak diketahui | Tidak diketahui | |
| Minimum (metal) pitch | 46 nm | Tidak diketahui | 40 nm | 40 nm[26] | Tidak diketahui | 42 nm | Tidak diketahui | |||
| EUV implementation | 36 nm pitch metal;[6] 20% of total layer set |
Tidak diketahui | None, used self-aligned quad patterning (SAQP) instead | 4 layers | 5 layers | None. Relied on SAQP heavily | None | None | Yes (after N+2) | |
| EUV-limited wafer output | 1500 wafers/day[27] | Tidak diketahui | N/A | ~ 1000 wafers/day[28] | Tidak diketahui | N/A | Tidak diketahui | Tidak diketahui | Tidak diketahui | |
| Multipatterning (≥ 2 masks on a layer) |
Fins Gate Vias (double-patterned)[29] Metal 1 (triple-patterned)[29] 44 nm pitch metal (quad-patterned)[6] |
Tidak diketahui | Fins Gate Contacts/vias (quad-patterned)[30] Lowest 10 metal layers |
Same as N7, with reduction on 4 EUV layers | Same as N7, with reduction on 5 EUV layers | multipatterning with DUV | multipatterning with DUV | Tidak diketahui | ||
| Release status | 2018 risk production 2019 production |
2020 production | 2017 risk production 2018 production[1] |
2019 production | 2018 risk production[1] 2019 production |
2020 risk production 2020 production |
2021 production[13] | April 2021 risk production, mass production unknown | Late 2021 risk production, quietly produced since July 2021[31] | Postponed due to US embargo |
Lihat pula
- International Technology Roadmap for Semiconductors
- Fabrikasi semikonduktor
- Fotolitografi
- Litografi ultraviolet ekstrem
- Litografi rendam
- ASML Holding pemasok sistem fotolitografi terbesar, terutama untuk industri semikonduktor.
- SEMI — The semiconductor industry trade association
- Electronic design automation
- Fab
- Foundry
- GDS-II
- OASIS
- Taiwan Semiconductor Manufacturing Company TSMC
- Applied Materials
- KLA Corporation
- Lam Research
- Tokyo Electron
- GlobalFoundries
- United Microelectronics Corporation
- Semiconductor Manufacturing International Corporation
- Shanghai Micro Electronics Equipment
- Sirkuit terpadu
- Mikroprosesor
- Unit Pemroses Sentral
- MOSFET
- Transistor
- Semikonduktor
- Nanometer
Referensi
- ^ a b c "7nm Technology". TSMC. Diakses tanggal June 30, 2019.
- ^ Chen, Monica; Shen, Jessie (22 June 2018). "TSMC ramping up 7nm chip production". DigiTimes. Diakses tanggal September 17, 2022.
- ^ Shankland, Stephen (September 12, 2018). "Apple's A12 Bionic CPU for the new iPhone XS is ahead of the industry moving to 7nm chip manufacturing tech". CNET. Diakses tanggal September 16, 2018.
- ^ Summers, N. (September 12, 2018). "Apple's A12 Bionic is the first 7-nanometer smartphone chip". Engadget (dalam bahasa American English). Diakses tanggal September 20, 2018.
- ^ Smith, Ryan (July 26, 2018). "AMD "Rome" EPYC CPUs to Be Fabbed By TSMC". AnandTech. Diakses tanggal 18 June 2019.
- ^ a b c J. Kim et al., Proc. SPIE 10962, 1096204 (2019).
- ^ "VLSI 2018: Samsung's 2nd Gen 7nm, EUV Goes HVM". WikiChip. August 4, 2018. Diakses tanggal September 16, 2022.
- ^ "Samsung Electronics Starts Production of EUV-based 7nm LPP Process". Samsung Newsroom. October 18, 2018. Diakses tanggal September 16, 2022.
- ^ "Samsung Starts Mass Production at V1: A Dedicated EUV Fab for 7nm, 6nm, 5nm, 4nm, 3nm Nodes".
- ^ IEDM 2016
- ^ Schor, David (July 28, 2019). "TSMC Talks 7nm, 5nm, Yield, And Next-Gen 5G And HPC Packaging". WikiChip Fuse (dalam bahasa American English). Diakses tanggal September 13, 2019.
- ^ "TSMC Goes Photon to Cloud". EETimes. October 4, 2018.
- ^ a b Cutress, Ian. "Intel's Process Roadmap to 2025: with 4nm, 3nm, 20A and 18A?!". www.anandtech.com. Diakses tanggal 2021-07-27.
- ^ Bonshor, Gavin (20 October 2022). "Intel Core i9-13900K and i5-13600K Review: Raptor Lake Brings More Bite". AnandTech. Diakses tanggal 28 September 2023.
- ^ "Can TSMC Maintain Their Process Technology Lead". July 18, 2023.
- ^ "Samsung 3nm GAAFET Enters Risk Production; Discusses Next-Gen Improvements". July 5, 2022.
- ^ a b Jones, Scotten (May 3, 2019). "TSMC and Samsung 5nm Comparison". Semiwiki. Diakses tanggal 30 July 2019.
- ^ "N3E Replaces N3; Comes in Many Flavors". September 4, 2022.
- ^ Schor, David (April 16, 2019). "TSMC Announces 6-Nanometer Process". WikiChip Fuse (dalam bahasa American English). Diakses tanggal May 31, 2019.
- ^ Jones, Scotten (July 18, 2023), Can TSMC Maintain Their Process Technology Lead
- ^ "Intel's Process Roadmap to 2025: With 4nm, 3nm, 20A and 18A?!".
- ^ Schor, David (2022-06-19). "A Look At Intel 4 Process Technology". WikiChip Fuse.
- ^ SMIC Mass Produces 14nm Nodes, Advances To 5nm, 7nm, September 16, 2022
- ^ "百度安全验证". wappass.baidu.com. Diakses tanggal 2023-09-06.
- ^ a b "VLSI 2018: Samsung's 2nd Gen 7nm, EUV Goes HVM". WikiChip Fuse (dalam bahasa American English). 2018-08-04. Diakses tanggal 2019-05-31.
- ^ Smith, Ryan (June 13, 2022). "Intel 4 Process Node In Detail: 2x Density Scaling, 20% Improved Performance". AnandTech. Diakses tanggal September 17, 2022.
- ^ "Samsung Ramps 7nm EUV Chips". EETimes. October 17, 2018.
- ^ "TSMC Q1 2018 earnings call transcript, p.12" (PDF). Diarsipkan dari asli (PDF) tanggal October 14, 2018. Diakses tanggal October 14, 2018.
- ^ a b W. C. Jeong et al., VLSI Technology 2017.
- ^ Dillinger, Tom (March 23, 2017). "Top 10 Updates from the TSMC Technology Symposium, Part II". SemiWiki. Diakses tanggal September 16, 2022.
- ^ Paul Alcorn (21 July 2022). "China's SMIC Shipping 7nm Chips, Reportedly Copied TSMC's Tech". Tom's Hardware.
Prana Luar
| Didahului oleh 10 nm |
proses MOSFET fabrikasi perangkat semikonduktor |
Dilanjutkan oleh 5 nm |
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