HARMST
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HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies, used to create high-aspect-ratio microstructures[1] with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
See also
References
- ^ Gerlach, Gerald (2008). Introduction to microsystem technology : a guide for students. Internet Archive. Chichester, England; Hoboken, NJ : J. Wiley & Sons. p. 138. ISBN 978-0-470-05861-9.
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